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Gettering of iron in CZ-silicon by polysilicon layer
Aalto University.
Aalto University.
Aalto University.
Aalto University.
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2011 (English)In: Physica Status Solidi. C, Current topics in solid state physics, ISSN 1610-1634, E-ISSN 1610-1642, Vol. 8, no 3, p. 751-754Article in journal (Refereed) Published
Place, publisher, year, edition, pages
Wiley-VCH Verlagsgesellschaft, 2011. Vol. 8, no 3, p. 751-754
Keywords [en]
iron, gettering, polysilicon
National Category
Condensed Matter Physics
Research subject
Physics
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URN: urn:nbn:se:kau:diva-37262DOI: 10.1002/pssc.201000194OAI: oai:DiVA.org:kau-37262DiVA, id: diva2:844088
Available from: 2015-08-03 Created: 2015-08-03 Last updated: 2017-05-24Bibliographically approved

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Lindroos, Jeanette

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