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Experimental evidence on removing copper and light-induced degradation from silicon by negative charge
Finland.
Department of Micro- and Nanosciences, Aalto University, Finland.ORCID iD: 0000-0002-4569-5788
Germany.
Germany.
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2014 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 105, no 18, article id 182108Article in journal (Refereed) Published
Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2014. Vol. 105, no 18, article id 182108
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Condensed Matter Physics
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URN: urn:nbn:se:kau:diva-37260DOI: 10.1063/1.4901533ISI: 000345000000042OAI: oai:DiVA.org:kau-37260DiVA, id: diva2:844086
Available from: 2015-08-03 Created: 2015-08-03 Last updated: 2017-12-04Bibliographically approved

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Publisher's full texthttp://scitation.aip.org/content/aip/journal/apl/105/18/10.1063/1.4901533

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Lindroos, Jeanette

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