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New large area PECVD-system for a-SiN:H deposition at 13.56 MHz
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2003 (English)Conference paper (Other academic)
Place, publisher, year, edition, pages
2003. 1515-1518 p.
National Category
Condensed Matter Physics
Research subject
Physics
Identifiers
URN: urn:nbn:se:kau:diva-27938OAI: oai:DiVA.org:kau-27938DiVA: diva2:629042
Conference
3rd World Conference on Photovoltaic Energy Conversion Osaka Japan 11-18 May 2003
Available from: 2013-06-15 Created: 2013-06-15 Last updated: 2015-09-17Bibliographically approved

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Rinio, Markus
Condensed Matter Physics

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