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MEMS Sensor for in Situ TEM Atomic Force Microscopy
Chalmers University of Technology, Gothenburg .
Chalmers University of Technology, Gothenburg .
Imego Institute, Gothenburg.
Karlstad University, Faculty of Technology and Science, Department of Physics and Electrical Engineering.ORCID iD: 0000-0003-1711-5595
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2008 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 17, no 2, 328-333 p.Article in journal (Refereed) Published
Abstract [en]

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.

Place, publisher, year, edition, pages
IEEE Press, 2008. Vol. 17, no 2, 328-333 p.
Keyword [en]
MEMS atomic force microscope sensor, MEMS sensor, TEM atomic force microscopy, TEM force measurements, Wheatstone bridge, high sensitivity, nanoscale systems, nanosized structure mechanical characterization, nanotubpiezoresistive elements, pole gap, sensing device, sensor fabrication, standard micromachining, transmission electron microscope
National Category
Physical Sciences
Research subject
Physics
Identifiers
URN: urn:nbn:se:kau:diva-21407DOI: 10.1109/JMEMS.2007.912714ISI: 000278268200018OAI: oai:DiVA.org:kau-21407DiVA: diva2:595081
Available from: 2013-01-21 Created: 2013-01-21 Last updated: 2016-02-22Bibliographically approved

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