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Boron at Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices
Karlstad University, Faculty of Technology and Science, Department of Physics and Electrical Engineering. (Materialfysik)ORCID iD: 0000-0003-1711-5595
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2008 (English)In: MicroMechanics Europe 2008, 2008Conference paper, (Refereed)
Place, publisher, year, edition, pages
2008.
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Physical Sciences
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URN: urn:nbn:se:kau:diva-15929OAI: oai:DiVA.org:kau-15929DiVA: diva2:573165
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MME2008 19th MicroMechanics Europe Workshop September 28-30, 2008, Aachen, Germany
Available from: 2012-11-29 Created: 2012-11-29 Last updated: 2014-10-28Bibliographically approved

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http://iopscience.iop.org/0960-1317/19/1/015034

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Svensson, Krister
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  • apa
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