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MEMS Sensor for in Situ Tem Atomic Force Microscopy
Karlstad University, Faculty of Technology and Science, Department of Physics and Electrical Engineering. (Materialfysik)ORCID iD: 0000-0003-1711-5595
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2008 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
2008.
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kau:diva-15971OAI: oai:DiVA.org:kau-15971DiVA: diva2:573161
Patent
WIPO WO/2008/089950 (2008-07-31)
Note

WO Patent WO/2008/089,950

Available from: 2012-11-29 Created: 2012-11-29 Last updated: 2014-10-28Bibliographically approved

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http://patentscope.wipo.int/search/en/WO2008089950

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Svensson, Krister
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CiteExportLink to record
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