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Fabrication of nanoscale electrostatic lenses
Chalmers University of Technology, Göteborg.
Chalmers University of Technology, Göteborg.
C2V, 7500AH Enschede, The Netherlands.
MESA+Institute, Enschede, The Netherlands.
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2010 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 20, no 9, p. 095031-1-095031-7Article in journal (Refereed) Published
Abstract [en]

The fabrication of cylindrical multi-element electrostatic lenses at the nanoscale presents a challenge; they are high-aspect-ratio structures that should be rotationally symmetric, well aligned and freestanding, with smooth edges and flat, clean surfaces. In this paper, we present the fabrication results of a non-conventional process, which uses a combination of focused gallium ion-beam milling and hydrofluoric acid vapor etching. This process makes it possible to fabricate nanoscale electrostatic lenses down to 140 nm in aperture diameter and 4.2 µm in column length, with a superior control of the geometry as compared to conventional lithography-based techniques

Place, publisher, year, edition, pages
Philadelphia: Institute of Physics (IOP), 2010. Vol. 20, no 9, p. 095031-1-095031-7
National Category
Physical Sciences
Research subject
Physics
Identifiers
URN: urn:nbn:se:kau:diva-15932DOI: 10.1088/0960-1317/20/9/095031ISI: 000281398800031OAI: oai:DiVA.org:kau-15932DiVA, id: diva2:573153
Available from: 2012-11-29 Created: 2012-11-29 Last updated: 2017-12-07Bibliographically approved

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Publisher's full texthttp://iopscience.iop.org/0960-1317/20/9/095031/pdf/0960-1317_20_9_095031.pdf

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Svensson, Krister

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