Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Fabrication of nanoscale electrostatic lenses
Chalmers University of Technology, Göteborg.
Chalmers University of Technology, Göteborg.
C2V, 7500AH Enschede, The Netherlands.
MESA+Institute, Enschede, The Netherlands.
Show others and affiliations
2010 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 20, no 9, 095031-1-095031-7 p.Article in journal (Refereed) Published
Abstract [en]

The fabrication of cylindrical multi-element electrostatic lenses at the nanoscale presents a challenge; they are high-aspect-ratio structures that should be rotationally symmetric, well aligned and freestanding, with smooth edges and flat, clean surfaces. In this paper, we present the fabrication results of a non-conventional process, which uses a combination of focused gallium ion-beam milling and hydrofluoric acid vapor etching. This process makes it possible to fabricate nanoscale electrostatic lenses down to 140 nm in aperture diameter and 4.2 µm in column length, with a superior control of the geometry as compared to conventional lithography-based techniques

Place, publisher, year, edition, pages
Philadelphia: Institute of Physics (IOP), 2010. Vol. 20, no 9, 095031-1-095031-7 p.
National Category
Physical Sciences
Research subject
Physics
Identifiers
URN: urn:nbn:se:kau:diva-15932DOI: 10.1088/0960-1317/20/9/095031ISI: 000281398800031OAI: oai:DiVA.org:kau-15932DiVA: diva2:573153
Available from: 2012-11-29 Created: 2012-11-29 Last updated: 2015-12-29Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full texthttp://iopscience.iop.org/0960-1317/20/9/095031/pdf/0960-1317_20_9_095031.pdf

Search in DiVA

By author/editor
Svensson, Krister
By organisation
Department of Physics and Electrical Engineering
In the same journal
Journal of Micromechanics and Microengineering
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar

Altmetric score

Total: 150 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf