An upscalable perovskite film deposition method combining raster ultrasonic spray coating and chemical vapor deposition is reported. This method overcomes the coating size limitation of the existing stationary spray, single-pass spray, and spin-coating methods. In contrast with the spin-coating method (>90% Pb waste), negligible Pb waste during PbI2 deposition makes this method more environmentally friendly. Outstanding film uniformity across the entire area of 5 cm x 5 cm is confirmed by both large-area compatible characterization methods (electroluminescence and scattered light imaging) and local characterization methods (atomic force microscopy, scanning electron microscopy, photoluminescence mapping, UV-vis, and X-ray diffraction measurements on multiple sample locations), resulting in low solar cell performance decrease upon increasing device area. With the FAPb(I0.85Br0.15)(3) (FA = formamidinium) perovskite layer deposited by this method, champion solar modules show a power conversion efficiency of 14.7% on an active area of 12.0 cm(2) and an outstanding shelf stability (only 3.6% relative power conversion efficiency decay after 3600 h aging). Under continuous operation (1 sun light illumination, maximum power point condition, dry N-2 atmosphere with <5% relative humidity, no encapsulation), the devices show high light-soaking stability corresponding to an average T-80 lifetime of 535 h on the small-area solar cells and 388 h on the solar module.