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Low temperature activation of B implantation of Si subcell fabrication in III-V/Si tandem solar cells
KTH.
KTH.
Karlstad University, Faculty of Health, Science and Technology (starting 2013), Department of Engineering and Physics (from 2013). (Department of Engineering and Physics, Karlstad University)ORCID iD: 0000-0002-4745-1074
KTH.
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2019 (English)In: Proceedings of the 36th EU PVSEC 2019, WIP, 2019, p. 764-768Conference paper, Published paper (Other academic)
Abstract [en]

In this work, we investigated the Si pre-amorphization implantation (PAI) assisted low temperatureannealing process to activate boron implantation in n-Si in a hydride vapor phase epitaxy (HVPE) reactor, which canbe used for the Si subcell fabrication in the III-V/Si tandem solar cells enabled by the corrugated epitaxial lateralovergrowth (CELOG). A uniform boron activation in Si and a low emitter sheet resistance of 77 /sq was obtained atannealing temperatures of 600-700°C. High-resolution x-ray diffraction was used to study the recrystallization ofamorphous silicon and the incorporation of boron dopants in Si. Hall measurements revealed p-type carrierconcentrations in the order of 1020 cm-3. The n-Si wafers with B implantation activated at 700°C by HVPE wereprocessed to solar cells and characterized by the standard light-current-voltage measurement under AM1.5 spectrumand external quantum efficiency measurements. The developed B implantation and low temperature activationprocesses are applied to the InP/Si seed template preparation for CELOG, on which CELOG GaInP over a Si subcellwith a direct heterojunction was demonstrated.

Place, publisher, year, edition, pages
WIP, 2019. p. 764-768
Keywords [en]
Multijunction Solar Cell, III-V semiconductors, Annealing, Amorphous Silicon
National Category
Condensed Matter Physics
Research subject
Physics
Identifiers
URN: urn:nbn:se:kau:diva-74774DOI: 10.4229/EUPVSEC20192019-3BV.2.55ISBN: 3-936338-60-4 (print)OAI: oai:DiVA.org:kau-74774DiVA, id: diva2:1351801
Conference
European Photovoltaic Solar Energy Conference, Marseille (2019)
Funder
Swedish Energy Agency, 40176-1Available from: 2019-09-16 Created: 2019-09-16 Last updated: 2019-11-21Bibliographically approved

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Hansson, RickardRinio, Markus

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CiteExportLink to record
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