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Nanofabrication of tungsten zone plates with integrated platinum central stop for hard X-ray applications
KTH.
KTH.
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2014 (English)In: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 116, 40-43 p.Article in journal (Refereed) Published
Abstract [en]

We present a nanofabrication process for producing tungsten zone plates used in hard X-ray applications including a method of integrating a high-energy absorbing central stop with the optic. Tungsten zone plates are structured with electron-beam lithography and subsequent reactive ion etching. The central stop originates from a platinum wire. It is cut to dimension by focused ion beam etching, and afterwards attached to the zone plate center using ion beam induced deposition of platinum. A zone plate with integrated central stop will simplify alignment in hard X-ray scanning microscope arrangements where the 0th order light must be eliminated. The focusing performance of the zone plate device was investigated by scanning coherent diffraction imaging (ptychography) at 8 keV photon energy. We could demonstrate a diffraction-limited focus size of 53 nm diameter full-width-at-half-maximum. Tungsten zone plates with integrated central stops show promising results for use in hard X-ray microscopes at high-brightness facilities.

Place, publisher, year, edition, pages
Elsevier, 2014. Vol. 116, 40-43 p.
Keyword [en]
Hard X-ray microscopy, Platinum, Ptychography, Tungsten, X-ray diffractive optics, Zone plates
National Category
Other Physics Topics
Research subject
Physics
Identifiers
URN: urn:nbn:se:kau:diva-63919DOI: 10.1016/j.mee.2013.10.011ISI: 000331161300008Scopus ID: 2-s2.0-84892374286OAI: oai:DiVA.org:kau-63919DiVA: diva2:1143802
Funder
Swedish Foundation for Strategic Research Swedish Research CouncilEU, FP7, Seventh Framework Programme, 226716]
Available from: 2017-09-22 Created: 2017-09-22 Last updated: 2017-09-28Bibliographically approved

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Rahomäki, JussiBelova, LiubovHolmberg, AndersHertz, Hans M.Vogt, Ulrich
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CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
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Output format
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