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NanoXCT: Development of a laboratory nano-CT system
Fraunhofer-Institut für Integrierte Schaltungen (IIS), Germany.
Fraunhofer-Institut für Integrierte Schaltungen (IIS), Germany.
Fraunhofer-Institut für Integrierte Schaltungen (IIS), Germany.
Fraunhofer-Institut für Integrierte Schaltungen (IIS), Germany.
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2014 (English)In: Proceedings of SPIE - The International Society for Optical Engineering / [ed] Stuart R. Stock, SPIE - International Society for Optical Engineering, 2014, Vol. 9212Conference paper, Published paper (Refereed)
Abstract [en]

The NanoXCT project aims at developing a laboratory nano-CT system for non-destructive testing applications in the micro- and nano-technology sector. The system concept omits the use of X-ray optics, to be able to provide up to 1 mm FOV (at 285 nm voxel size) and down to 50 nm voxel size (at 0.175 mm FOV) while preserving the flexibility of state-of-the-art micro-CT systems. Within the project a suitable X-ray source, detector and manipulation system are being developed. To cover the demand for elemental analysis, the project will additionally include X-ray spectroscopic techniques. These will be reported elsewhere while this paper is focused on the imaging part of the project. We introduce the system concept including design goals and constraints, and the individual components. We present the current state of the prototype development including first results.

Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2014. Vol. 9212
Keyword [en]
Computed tomography, Nano-CT, Nano-focus, NanoXCT, Photon-counting X-ray detector, Timepix detector, Transmission tube, Imaging systems, Nondestructive examination, Spectroscopic analysis, Tomography, X ray apparatus, X ray spectroscopy, Timepix detectors, X-ray detector, Computerized tomography
National Category
Medical Engineering
Identifiers
URN: urn:nbn:se:kau:diva-63913DOI: 10.1117/12.2061752ISI: 000344554400017Scopus ID: 2-s2.0-84923031242ISBN: 9781628412390 (print)OAI: oai:DiVA.org:kau-63913DiVA: diva2:1143796
Conference
Developments in X-Ray Tomography IX Event: SPIE Optical Engineering + Applications,18 August 2014 through 20 August 2014, San Diego, California, United States
Available from: 2017-09-22 Created: 2017-09-22 Last updated: 2017-10-09Bibliographically approved

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