Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Fabrication of nanoscale electrostatic lenses
Chalmers University of Technology, Göteborg.
Chalmers University of Technology, Göteborg.
C2V, 7500AH Enschede, The Netherlands.
MESA+Institute, Enschede, The Netherlands.
Vise andre og tillknytning
2010 (engelsk)Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 20, nr 9, s. 095031-1-095031-7Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

The fabrication of cylindrical multi-element electrostatic lenses at the nanoscale presents a challenge; they are high-aspect-ratio structures that should be rotationally symmetric, well aligned and freestanding, with smooth edges and flat, clean surfaces. In this paper, we present the fabrication results of a non-conventional process, which uses a combination of focused gallium ion-beam milling and hydrofluoric acid vapor etching. This process makes it possible to fabricate nanoscale electrostatic lenses down to 140 nm in aperture diameter and 4.2 µm in column length, with a superior control of the geometry as compared to conventional lithography-based techniques

sted, utgiver, år, opplag, sider
Philadelphia: Institute of Physics (IOP), 2010. Vol. 20, nr 9, s. 095031-1-095031-7
HSV kategori
Forskningsprogram
Fysik
Identifikatorer
URN: urn:nbn:se:kau:diva-15932DOI: 10.1088/0960-1317/20/9/095031ISI: 000281398800031OAI: oai:DiVA.org:kau-15932DiVA, id: diva2:573153
Tilgjengelig fra: 2012-11-29 Laget: 2012-11-29 Sist oppdatert: 2017-12-07bibliografisk kontrollert

Open Access i DiVA

Fulltekst mangler i DiVA

Andre lenker

Forlagets fullteksthttp://iopscience.iop.org/0960-1317/20/9/095031/pdf/0960-1317_20_9_095031.pdf

Personposter BETA

Svensson, Krister

Søk i DiVA

Av forfatter/redaktør
Svensson, Krister
Av organisasjonen
I samme tidsskrift
Journal of Micromechanics and Microengineering

Søk utenfor DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric

doi
urn-nbn
Totalt: 182 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf