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Low temperature activation of B implantation of Si subcell fabrication in III-V/Si tandem solar cells
KTH.
KTH.
Karlstads universitet, Fakulteten för hälsa, natur- och teknikvetenskap (from 2013), Institutionen för ingenjörsvetenskap och fysik (from 2013). (Department of Engineering and Physics, Karlstad University)ORCID-id: 0000-0002-4745-1074
KTH.
Vise andre og tillknytning
2019 (engelsk)Inngår i: Proceedings of the 36th EU PVSEC 2019, WIP, 2019, s. 764-768Konferansepaper, Publicerat paper (Annet vitenskapelig)
Abstract [en]

In this work, we investigated the Si pre-amorphization implantation (PAI) assisted low temperatureannealing process to activate boron implantation in n-Si in a hydride vapor phase epitaxy (HVPE) reactor, which canbe used for the Si subcell fabrication in the III-V/Si tandem solar cells enabled by the corrugated epitaxial lateralovergrowth (CELOG). A uniform boron activation in Si and a low emitter sheet resistance of 77 /sq was obtained atannealing temperatures of 600-700°C. High-resolution x-ray diffraction was used to study the recrystallization ofamorphous silicon and the incorporation of boron dopants in Si. Hall measurements revealed p-type carrierconcentrations in the order of 1020 cm-3. The n-Si wafers with B implantation activated at 700°C by HVPE wereprocessed to solar cells and characterized by the standard light-current-voltage measurement under AM1.5 spectrumand external quantum efficiency measurements. The developed B implantation and low temperature activationprocesses are applied to the InP/Si seed template preparation for CELOG, on which CELOG GaInP over a Si subcellwith a direct heterojunction was demonstrated.

sted, utgiver, år, opplag, sider
WIP, 2019. s. 764-768
Emneord [en]
Multijunction Solar Cell, III-V semiconductors, Annealing, Amorphous Silicon
HSV kategori
Forskningsprogram
Fysik
Identifikatorer
URN: urn:nbn:se:kau:diva-74774DOI: 10.4229/EUPVSEC20192019-3BV.2.55ISBN: 3-936338-60-4 (tryckt)OAI: oai:DiVA.org:kau-74774DiVA, id: diva2:1351801
Konferanse
European Photovoltaic Solar Energy Conference, Marseille (2019)
Forskningsfinansiär
Swedish Energy Agency, 40176-1Tilgjengelig fra: 2019-09-16 Laget: 2019-09-16 Sist oppdatert: 2019-11-21bibliografisk kontrollert

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